WAFER

 

Specifikacija Wafer-ja

Premer (mm)  25,4  50,8  76,2  100,0 125,0 150,0         Tip in elementi dopiranja  n-type P   - Phosphorus Sb - Antimony As - Arsenic doped  p-type B - Boron         Orientiranost (100) (110) (111)     Toleranca orientiranosti standard : +/- 0,5° upon request : until +/- 0,01°     Odmik od orientiranosti upon request (up to 25°)         Upornost Cz : From 1 milliohmcm to 150 Ωcm FZ : up to 10 kΩcm     Debelina   1" 2" 3" 4" 5" 6" standard (µm ) 250 275 380 525 625 675 tolerance +/- (µm ) 15 25 25 20 20 20         Površina As Cut Lapped Etched SSP DSP     Premer * 1" 2" 3" 4" 5" 6"     Particle count 10-25 10-25 10-25 < 10 < 15 < 15     TTV Std (µm) * 7 12 10 10 10 10     TTV min (µm) * 3 3 3 2 3 3     Bow (µm)   * < 30 < 30 < 30 < 40 < 40 < 40       Roughness (Ra) On polished surface : Less than 1 nm     Flatness On polished surface : Less than 1 µm     Laser marking Upon request   SEMI STANDARDS All other specifications comply with SEMI STD (packaging, product identification, ...)